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CN102378895B 一种用于检测加速度和旋转速度的方法及微机电传感器 有权 转让

一种用于检测加速度和旋转速度的方法及微机电传感器
摘要：
本发明涉及一种微机电传感器和一种用来检测加速度和旋转速度的方法，至少其中一个，尤其涉及借助微机电传感器（1）检测相互垂直的空间三轴X,Y和Z方向中的两个方向，其中微机电传感器包括移动安装在基板（2）上的至少一个驱动模块（6；6.1，6.2）和至少一个感应模块（5），至少一个驱动模块（6；6.1，6.2）相对于至少一个感应模块（5）以一个驱动频率作振动式运动，当传感器的外部加速度产生时，驱动模块（6；6.1，6.2）和感应模块（5）以一个加速度频率偏离，当传感器的外部旋转速度产生时，该驱动模块（6；6.1，6.2）和感应模块（5）以一个旋转速度频率偏离，该加速度频率和旋转速度频率是不同的。微机电传感器的驱动模块和感应模块通过至少一个固定部（3）固定安装在基板上。在驱动模式中，当驱动模块相对于至少一个固定部振动时，在驱动模块和感应模块之间相对于至少一个固定部产生一种不平衡，感应元件检测驱动模块和感应模块的偏离，要取决于以加速度频率和/或旋转速度产生的扭矩和科里奥利力（Coriolisforce）。
摘要（英）：

The invention concerns a MEMS sensor and a method for detecting accelerations along, and rotation rates about, at least one, preferably two of three mutually perpendicular spatial axes x, y and z by means of a MEMS sensor (1), wherein at least one driving mass (6; 6.1, 6.2) and at least one sensor mass (5) are moveably arranged on a substrate (2) and the at least one driving mass (6; 6.1, 6.2) is moved relative to the at least one sensor mass (5) in oscillation at a driving frequency and when an external acceleration of the sensor occurs, driving mass/es (6; 6.1, 6.2) and sensor mass/es (5) are deflected at an acceleration frequency and, when an external rotation rate of the sensor (1) occurs, are deflected at a rotation rate frequency, and the acceleration frequency and rotation rate frequency are different. At the MEMS-sensor the driving mass/es (6; 6.1, 6.2) and sensor mass/es (5) are arranged on the substrate (2), and are balanced in the resting state by means of at least one of the anchors (3). In the driving mode the driving mass/es (6; 6.1, 6.2), when vibrating in oscillation about this at least one anchor (3), generate/s an imbalance of the driving mass/es (6; 6.1, 6.2) and the sensor mass/es (5) with respect to this at least one anchor (3), and the sensor elements detect deflections of the driving and sensor masses, due to torques and Coholis forces generated, with an acceleration frequency and/or a rotation rate frequency.

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