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CN102403195A 纵型热处理装置及其控制方法 无效 - 撤回

纵型热处理装置及其控制方法
摘要：
提供一种使处理容器内的温度高精度地收敛到目标温度并且能够缩短收敛时间的纵型热处理装置及其控制方法。热处理装置(1)具备：炉本体(5)、设置在炉本体(5)内周面的加热器(18A)、配置在炉本体(5)内的处理容器(3)、连接在炉本体(5)的冷却介质供给鼓风机(53)和冷却介质排气鼓风机(63)以及设置在处理容器(3)内的温度传感器(50)。来自温度传感器(50)的信号发送给控制装置(51)的加热器输出运算部(51a)。在加热器输出运算部(51a)中，根据由设定温度决定部(51c)求出的设定温度(A)和来自温度传感器(50)的温度来求出在仅用加热器(18A)进行温度调整时的加热器输出。鼓风机输出运算部(51b)根据加热器输出来产生鼓风机输出。
摘要（英）：

Provided is a longitudinal type heat treatment apparatus and a control method thereof. The heat treatment apparatus (1) comprises a furnace body (5), a heater (18A) arranged at the inner circumference of the furnace body (5), a processing container (3) arranged in the furnace body (5), a cooling medium supply blower (53) connected with the furnace body (5), a cooling medium venting blower (63), and a temperature sensor (50) arranged in the processing container (3), wherein the signals from the temperature sensor (50) are sent to the heater output operating portion (51a) of a control apparatus (51); the heater output can be figured out when only the heater (18A) is employed for temperature adjustment, according to the set temperature (A) calculated by a set temperature determining portion (51C) and the temperature from the temperature sensor (50); and the blower output operating portion (51b) produces blower output according to the heater output.

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