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发明授权
CN102487267B 压电振动元件及其制造方法、压电振子及压电振荡器 失效 - 权利终止

压电振动元件及其制造方法、压电振子及压电振荡器
摘要：
本发明涉及压电振动元件及其制造方法、压电振子及压电振荡器。所述压电振动元件小型且由于过度蚀刻而导致的、自预定的频率的频率偏差较少。压电基板(10)具备：多个棒状的振动臂(15a、15b)；基部(12)，其对各个振动臂(15a、15b)的一侧端部之间进行连接；锤部(20a、20b)，其分别被形成在各个振动臂(15a、15b)的另一侧端部上且宽度宽于各个振动臂(15a、15b)；槽部(17a、17b)，其分别被形成在沿着各个振动臂(15a、15b)的振动中心线(B)的表面及背面上。而且，具备分别被形成在包括各槽部内部在内的各个振动臂的表面及背面上的激励电极(30～36)，在各个锤部(20)上形成有多条分别贯穿表面及背面且沿着各个所述振动臂的长度方向而以直线状延伸的频率调节用狭缝(25)。
摘要（英）：

A piezoelectric substrate includes rod-shaped resonating arms; a base portion that connects one set of end portions of the respective resonating arms; weight portions which are formed on the other end portions of the respective resonating arms and which have a width larger than that of the respective resonating arms; and groove portions which are formed on each of the front and rear surfaces along the center line of vibration of the respective resonating arms. The piezoelectric substrate also includes excitation electrodes which are formed on each of the front and rear surfaces of the respective resonating arms including the inner side of the respective groove portions. A plurality of frequency adjustment slits extending in a straight line form along the longitudinal direction of the respective resonating arms are formed on the respective weight portions so as to penetrate through the front and rear surfaces of the weight portions.

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