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发明公开
CN102645454A 具有纳米纤维敏感层的平面式乙炔气体传感器 无效 - 撤回

具有纳米纤维敏感层的平面式乙炔气体传感器
摘要：
一种具有纳米纤维敏感层的平面式乙炔气体传感器，气敏材料为掺杂二氧化锡纳米纤维，对于乙炔气体具有高选择性，属于气体传感器技术领域。在现有技术中尚无采用纳米纤维气敏材料的乙炔气体传感器。本发明之乙炔气体传感器在硅衬底两侧绝缘层上分别布有加热电极和信号电极，乙炔气体敏感层位于信号电极上，乙炔气体敏感层形态为SnO2纳米纤维网，气敏材料为同时掺In、Sm、Co的SnO2，In、Sm、Co的掺入量分别为In2O3、Sm2O3、Co3O4、SnO2四种氧化物总质量的5～7％、43～45％、1～2％。该具有纳米纤维敏感层的平面式乙炔气体传感器能够实现一线全天候多点乙炔气体探测。
摘要（英）：

The invention relates to a planar-type acetylene gas sensor with a nanofiber sensitive layer, belonging to the technical field of gas sensors. The gas sensitive material refers to stannic oxide doped nanofiber with high selectivity to the acetylene gas. In the prior art, no acetylene gas sensor with nanofiber gas sensitive materials is available. A heating electrode and a signal electrode are respectively distributed on the insulating layers on the two sides of a silicon substrate of the acetylene gas sensor; the acetylene gas sensitive layer is arranged on the signal electrode and in the form of SnO2 nanofiber web; and the gas sensitive material refers to SnO2 doped with In, Sm and Co, wherein the In, Sm and Co respectively account for 5-7%, 43-45% and 1-2% of the total mass of four oxides of In2O3, Sm2O3, Co3O4 and SnO2. The planar-type acetylene gas sensor with a nanofiber sensitive layer can realize one-line all-weather multi-point acetylene gas exploration.

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