A tunable interference filter includes: a first substrate, a second substrate opposite to the first substrate; a first reflection film provided on the surface of the first substrate opposite to the second substrate; a second reflection film provided on the surface of the second substrate opposite to the first substrate; the second reflection film being opposite to the first reflection film via a reflection film gap; a first electrode provided on the surface of the first substrate opposite to the second substrate; wherein the first substrate possesses a first reflection film fixing surface equipped with the first reflection film; and a first electrode surface equipped with the first electrode. The distance of the first electrode surface and the second substrate is different from the distance of the first reflection film fixing surface and the second substrate, and the surface on which the first reflection film fixing surface and the first electrode surface have a larger distance with the second substrate is equipped with a laminated layer where the first reflection film and the first electrode are laminated.