The invention discloses a method for manufacturing a particle source, comprising the following steps: putting a metal wire in a vacuum environment and accessing an active gas and a catalytic gas, adjusting the temperature of the metal wire, and applying a positive high pressure V to the metal wire so as to dissociate the active gas on the surface of the metal wire, generating an etching belt on the side surface of the metal wire head, performing field etching in the etching belt; enhancing the electric field of the surface of the metal wire head top end by the field etching till exceeding the electric field of a field evaporation of the metal wire material so as to evaporate out the metal atom at the electric field; co-adjusting the two mechanisms of the field etching and the field evaporation until the metal wire head is changed into the shape which consists of a base and a needle point on the base after the field etching touches off the field evaporation, wherein the field etching generates on the side face to form the base, and yet the field evaporation generates at the top end to form the needle point; and stopping the field etching and the field evaporation when obtaining the metal wire head with predetermined shape.