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发明公开
CN103098135A 磁记录介质用软磁性合金、溅射靶材以及磁记录介质 有权

磁记录介质用软磁性合金、溅射靶材以及磁记录介质
摘要：
本发明提供具有低矫顽磁力、高无定形性、高耐腐蚀性及高硬度的垂直磁记录介质用软磁性合金、以及用于制作该合金的薄膜的溅射靶。该合金以at.％计含有Zr及Hf的1种或2种合计为6～20％、含有B1～20％、含有Ti、V、Nb、Ta、Cr、Mo、W、Ni、Al、Si、P的1种或2种以上合计0～7％，剩余部分含有Co和/或Fe、以及不可避免的杂质。该合金还满足6≤2×(Zr％+Hf％)-B％≤16、以及0≤Fe％/(Fe％+Co％)＜020。
摘要（英）：

A soft magnetic alloy for a perpendicular magnetic recording medium, which has a low coercive force, high amorphous properties, high corrosion resistance, and a high hardness, and a sputtering target for forming a thin film of this alloy are provided. This alloy comprises, in at. %, 6 to 20% in total of one or two elements selected from Zr and Hf, 1 to 20% of B, 0 to 7% in total of one or more elements selected from Ti, V, Nb, Ta, Cr, Mo, W, Ni, Al, Si, and P, with the remainder comprising Co and/or Fe and unavoidable impurities. This alloy further satisfies 6 <= 2*(Zr%+Hf%)-B% <= 16 and 0 <= Fe%/(Fe%+Co%) < 0.20.

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