利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN103151307A 渠道刻划装置以及渠道刻划方法 有权

渠道刻划装置以及渠道刻划方法
摘要：
本发明公开一种渠道刻划装置以及渠道刻划方法，其用以对基材进行渠道刻划。所述装置包括平台、导杆结构、支撑载具以及针具装置。导杆结构位于平台上。支撑载具固定于导杆结构上，其中基材放置于支撑载具上。针具装置位于支撑载具的上方，其中所述针具装置包括针具固持件以及固定在针具固持件上的多个针具，且所述针具排列成至少一直线。
摘要（英）：

A trench scribing apparatus and a trench scribing method adapted to scribe a trench on a substrate are provided. The apparatus includes a platen, a guide rod structure, a supporting carrier and a pin device. The guide rod structure is disposed above the platen. The supporting carrier is fixed on the guide rod structure, and the substrate is disposed on the supporting carrier. The pin device is disposed above the supporting carrier and includes a pin holder and a plurality of pins fastened on the pin holder, and the pins are arranged into at least one straight line.

公开/授权文献
0/0