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Invention Grant
CN103210483B 用于在工件上生成图案的设备 有权

用于在工件上生成图案的设备
Abstract:
一种被配置为拾取和在工件上放置至少一个芯片的拾取和放置工具包括安装头。该安装头包括：芯片位置确定单元，被配置为在将至少一个芯片放置在该工件上与拾起用于放置在该工件上的随后芯片之间的时间期间，对该至少一个芯片的实际位置进行测量和检测中的一者。
Abstract(English):

A pick-and-place tool configured to pick and place at least one die on a workpiece includes a mounting head. The mounting head includes a die position determining unit configured to one of measure and detect an actual position of at least one die during a time between the placement of the at least one die on the workpiece and the picking up of a subsequent die for placement on the workpiece.

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