The invention relates to the technical field of display device cleaning and discloses a substrate cleaning device, system and method. The substrate cleaning device comprises a water tank, a water pump connected with the water tank and a plurality of nozzles connected with the water pump, wherein fluid flowing out from the plurality of nozzles is sprayed on substrates. The substrate cleaning device further comprises a heater, wherein the heater is arranged in the substrate cleaning device and used for heating the fluid before the fluid flows out of the nozzles. In the technical scheme, due to heating effect of the heater, temperature of the fluid for cleaning the substrates can be improved, molecular movement of the fluid is accelerated, and therefore solubility of foreign organic matters in the fluid is improved, removal probability of the foreign organic matters is increased, and yield of products is improved.