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发明公开
CN103502650A 真空泵、真空排气装置及真空泵的运转控制方法 有权

真空泵、真空排气装置及真空泵的运转控制方法
摘要：
本发明提供一种在不会发生失调、能够实现稳定的排气动作的真空泵、真空排气装置及真空泵的运转控制方法。真空泵具有：转子（21、22）；驱动马达（35）；磁耦合机构（50），其以第1阈值（Th1）以下的转动扭矩向所述转子传递所述驱动马达的转动力。该真空泵的运转控制方法为：当所述负载扭矩为比所述第1阈值（Th1）小的第2阈值（Th2）以下时，增大所述驱动马达（35）的转速，当所述负载扭矩超过所述第2阈值（Th2）且为所述第1阈值（Th1）以下时，减小所述驱动马达（35）的转速。
摘要（英）：

Provided are a vacuum pump capable of providing stable exhausting operation without causing loss of step, as well as a vacuum exhaust device and a method for operating a vacuum pump. A method for operating a vacuum pump comprising a rotor (21, 22), a drive motor (35), and a magnetic coupling (50) contrived so as to transfer rotational power of the drive motor to the rotor at a rotating torque not exceeding a first threshold (Th1), wherein the method is as following: the speed of the drive motor (35) is increased when the load torque does not exceed a second threshold (Th2) that is lower than the first threshold (Th1), and the speed of the drive motor (35) is reduced when the load torque exceeds the second threshold (Th2) but does not exceed the first threshold (Th1).

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