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发明授权
CN103904005B 测试和刻蚀衬底的多功能装置以及包括其的衬底加工装置 有权

测试和刻蚀衬底的多功能装置以及包括其的衬底加工装置
摘要：
公开了测试和刻蚀衬底的多功能装置以及包括该多功能装置的衬底处理装置，该多功能装置可通过在同一腔体执行测试和刻蚀操作而提高空间效率和制造效率。该多功能装置包括：在一侧具有入口、另一侧具有出口的腔体，衬底通过入口被输入腔体并通过出口从腔体输出；传送单元，设置于腔体内，被配置为在从入口到出口的方向传送输入的衬底；激光刻蚀单元，设置于传送单元上方，被配置为刻蚀设置于传送单元上的衬底的一部分；以及测试单元，配置为测试设置于传送单元上的衬底。
摘要（英）：

A multi-functional apparatus for testing and etching a substrate capable of increasing spatial efficiency and manufacturing efficiency by performing testing and etching operations in a same chamber body and a substrate processing apparatus including the same, the multi-functional apparatus including a chamber body having an entrance into which the substrate is injected in one of its sides and an exit from which the substrate is ejected in another one of its sides; a transfer unit disposed inside of the chamber body and for transferring the injected substrate in a direction from the entrance to the exit; a laser etching unit disposed on an upper portion of the transfer unit and for etching a part of the substrate disposed on the transfer unit; and a testing unit for testing the substrate disposed on the transfer unit.

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