The invention provides a vacuum pump with abatement function, at a low cost and quickly, which has a small-sized and removable abatement part attached at a downstream side of the vacuum pump, and can meet a required abatement performance by altering the combination of kinds, the number and arrangement, of the attached abatement parts. The vacuum pump (1) with abatement function includes a vacuum pump (1) having a discharge port to which at least one abatement part (10) for treating an exhaust gas discharged from the vacuum pump (1) to make the exhaust gas harmless is attached. The abatement part (10) is selected from a plurality of abatement parts (10) having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas to be connected to the discharge port.