The embodiment of the invention provides a process gas interlocking control method. The method includes the following steps that 1, an independent configuration page is set, corresponding configuration parameters are set for every two gas channels in the independent configuration page; 2, the configuration page is traversed, for the opening operation of a target path of the gas channel, the configuration parameters of the target path of the gas channels and other paths of the gas channels are inquired, whether the preset conditions are met or not is judged according to the target path of the gas channel and other paths of the gas channels, if yes, the step 3 is executed, and if not, the step 4 is executed; 3, the target path of the gas channel is opened; 4, alarm information is generated. According to the process gas interlocking control method, the configuration parameters of the gas channels are increased, and the function of online editing is achieved; application flexibility is improved through online parameter configuration editing and online application, efficiency is improved, and the waste of time is reduced.