Disclosed is a device for treating a disc-like article with a fluid, the device comprising dispensing means for dispensing a fluid onto the disc-like article and a chuck for holding and rotating a disc-like article around an axis A perpendicular to the disc-like article, the chuck comprises a base body and gripping members for contacting the disc-like article at its edge. The base body comprises an inclined ring-shaped lower surface, the gripping members can move radially relative to the axis A, and the gripping members are tightly sealed with the base body and guide downwards. When the disc-like article is supported by the gripping members, the lowest end of the inclined ring-shaped lower surface is lower than the disc-like article.