The invention provides a metal electrode manufacturing device comprising a slide holder (1), a cover plate (4) and a fixing part (5) which are sequentially arranged from bottom to top. The slide holder (1) comprises at least two slide parts on the same plane, a metal mask cover (2) crosses the slide holder, the section of the cover plate (4) positioned above the metal mask cover (2) is an elongated inverted groove, bumps at two ends of the cover plate are supported on the slide parts, and the metal mask cover (2) is laid according to the electrode shape of a chip arranged on a silicon slice. According to a metal electrode manufacturing method using the metal electrode manufacturing device in the evaporation process, metal reaches the surface of the silicon slice through a window of the metal mask cover, a thick metal electrode is deposited in a specified area, one-step photoetching and one-step metal etching processes are decreased, machining cycle is shortened, and production cost is reduced.