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发明公开
CN104734011A 面发光激光器以及原子振荡器 无效 - 撤回

面发光激光器以及原子振荡器
摘要：
本发明涉及面发光激光器以及原子振荡器，提供能够实现偏振光方向的稳定的面发光激光器。本发明所涉及的面发光激光器(100)包括基板(10)、设置在基板(10)上方的层叠体(2)、至少一部分设置在层叠体(2)上方的电极(82)、以及与电极(82)电连接并被进行引线接合的焊盘(84)，层叠体(2)包括设置在基板(10)上方的第1镜层(20)、设置在第1镜层(20)上方的活性层(30)、和设置在活性层(30)上方的第2镜层(40)，在俯视时，具有第1变形赋予部(2a)、第2变形赋予部(2b)、以及设置在第1变形赋予部(2a)与第2变形赋予部(2b)之间并使由活性层(30)产生的光谐振的谐振部(2c)，在俯视时，焊盘(84)被设置在与第1变形赋予部(2a)以及第2变形赋予部(2b)中的至少一方不重叠的位置上。
摘要（英）：

A vertical cavity surface emitting laser (100) includes: a substrate (10); a laminated body which is provided over the substrate; an electrode (82) of which at least a portion is provided over the laminated body; and a wire-bonded pad (84) which is electrically connected to the electrode, wherein the laminated body includes a first mirror layer (20) provided over the substrate, an active layer (30) provided over the first mirror layer, and a second mirror layer (40) provided over the active layer, in a plan view, the laminated body (2) includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated in the active layer, and in the plan view, the pad (84) is provided in a position that is not overlapped with at least one of the first distortion imparting portion and the second distortion imparting portion. The non-circular shape of the mesa (2) and lateral oxidation of the mirror layers with high Al content (60,62) being part of the mesa (2) together with the non-circular shape of the resin layer results in a stress induced preferred polarisation of the VCSEL emission.

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