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发明授权
CN104748835B 干涉量分离激光干涉测振仪非线性误差修正方法及装置 有权

干涉量分离激光干涉测振仪非线性误差修正方法及装置
摘要：
干涉量分离激光干涉测振仪非线性误差修正方法及装置属于激光测量技术领域，本发明利用光开关实现对参考光和测量光强度的分离测量，进而提取出相关光信号中的非线性误差参数，最终对正交信号的直流偏置误差和幅值不等误差进行矫正；本发明实现了对单频激光干涉测振仪信号中非线性误差参数的开机即提取、对单频激光干涉测振仪中的非线性误差做出快速实时修正的技术效果。
摘要（英）：

The invention provides an interference-mount separating type nonlinear error correcting method and device for a laser interference vibration tester, and belongs to the technical field of laser measurement. The method is that performing separating measurement for reference light and measuring light strength through a light switch; extracting nonlinear error parameters in the related light signals; correcting DC deviation error and non-uniform amplitude of an orthogonal signal and other errors. With the adoption of the method and the device, the technical effect of extracting the nonlinear error parameters in the laser interference vibration tester as startup and quickly correcting the nonlinear error in the laser interference vibration tester on real time can be achieved.

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