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CN104752603A 一种基于电场能抵消效应的铁电材料表面超精密加工方法 无效 - 驳回

一种基于电场能抵消效应的铁电材料表面超精密加工方法
摘要：
一种基于电场能抵消效应的铁电材料表面超精密加工方法，在铁电材料超精密加工时加入冷却液，所述冷却液中加入电解质溶液，通过所述电解质溶液中的自由离子来中和铁电材料被加工时由于压电效应和热释电效应产生的正负电荷，消除铁电材料内部产生的电场。本发明提供一种有效消除逆压电效应产生的内应力、加工效果较好、成品率较高的基于电场能抵消效应的铁电材料表面超精密加工方法。
摘要（英）：

An electric field energy offset effect based ferroelectric material surface ultra-precision machining method comprises the steps of adding cooling liquid during ferroelectric material ultra-precision machining, adding an electrolyte solution into the cooling liquid, utilizing free ions in the electrolyte solution to neutralize positive and negative charges produced when a ferroelectric material is machined due to piezoelectric effect and pyroelectric effect and eliminating an electric field produced inside the ferroelectric material. The electric field energy offset effect based ferroelectric material surface ultra-precision machining method effectively eliminates internal stress produced under the inverse piezoelectric effect, and is good in machining effect and higher in finished product rate.

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