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发明公开
CN104868869A 振子及其制造方法、以及电子装置 无效 - 撤回

振子及其制造方法、以及电子装置
摘要：
本发明涉及振子及其制造方法、以及电子装置。本发明所涉及电子装置的制造方法包括：基板；下部电极，其被形成在所述基板上，并形成有贯穿孔；上部电极，其以与所述下部电极隔开的方式被配置在所述下部电极的上方，并具有朝向所述贯穿孔突出的突起部；对置部，其被形成在所述基板上，并与所述突起部对置，所述对置部与所述突起部之间的距离小于所述下部电极与所述上部电极之间的距离。
摘要（英）：

A vibrator according to the invention includes: a substrate; a lower electrode that is formed on the substrate and has a through hole formed therein; an upper electrode that is disposed above the lower electrode so as to be spaced apart from the lower electrode, and includes a protruding portion that protrudes toward the through hole; and a facing portion that is formed on the substrate, and faces the protruding portion. A distance between the facing portion and the protruding portion is smaller than a distance between the lower electrode and the upper electrode.

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