The invention discloses a vertical recycling and air sealing device for an immersion type photoetching machine. A central conical hole is formed in a base body of an immersion unit; a vertical air liquid recycling cavity and an air injection cavity are formed in the bottom surface of the immersion unit; a horizontal liquid injection opening, a horizontal liquid recycling opening, an air injection opening and a vertical air liquid recycling opening are formed in the base body of the immersion unit; a central through hole is formed in the lower end cover of the immersion unit; a vertical air liquid recycling hole slot and an air sealing hole slot are formed in the top surface of the lower end cover of the immersion unit; vertical air liquid recycling holes are formed in the vertical air liquid recycling hole slot; air sealing holes are formed in the air sealing hole slot; a certain micro hole is positioned on a perpendicular bisector of two closest micro holes in the adjacent vertical recycling holes. The vertical recycling and air sealing device can finish the sealing function for a gap flow field in the immersion type photoetching machine; the boundary of the flow field of immersion liquid is restrained by recycling negative pressure for vertical recycling and air flow for air sealing, so that leakage of the immersion liquid is avoided in a high-speed running process of the photoetching machine.