The present invention provides a chlorosilane-containing waste gas recovery treatment apparatus, which comprises a chlorosilane recovery unit, a chlorosilane leaching unit and a tail gas emptying unit, wherein the chlorosilane recovery unit is connected with the chlorosilane leaching unit and is used for recovering partial chlorosilane gas in chlorosilane-containing waste gas and conveying the remaining waste gas to the chlorosilane leaching unit, the chlorosilane leaching unit is connected with the tail gas emptying unit and is used for leaching out the remaining chlorosilane gas and hydrogen chloride gas in the remaining waste gas so as to clear the chlorosilane gas and the hydrogen chloride gas in the remaining waste gas, and conveying the chlorosilane gas and hydrogen chloride gas-clearing remaining waste gas to the tail gas emptying unit, and the tail gas emptying unit is used for emptying the chlorosilane gas and hydrogen chloride gas-clearing remaining waste gas. With the recovery treatment apparatus of the present invention, the chlorosilane resource in the recovered waste gas can be completely recovered, and the pollution-free treatment can be performed on the chlorosilane incapable of being recovered in the waste gas.