The invention relates to a gas analysis control implementation device of a vacuum pumping system. The gas analysis control implementation device comprises a vacuum groove, a dust remover and a vacuum pump set, wherein the vacuum groove is connected with the dust remover through a vacuum pipeline I; the dust remover is connected with the vacuum pump set through a vacuum pipeline II; the vacuum pipeline II is provided with a laser gas analyzer and a pressure measurement instrument; the laser gas analyzer and the pressure measurement instrument are connected with the input end of a PLC controller respectively; the PLC controller is also connected with the vacuum pump set and a blowing gas source control switch respectively; the blowing gas source control switch is connected with a blowing gas source; and the blowing gas source is provided with a blowing gas pipe. The gas analysis control implementation device has the beneficial effects that the starting time for analyzing gas components of gas released from the vacuum groove is brought forward and the responding time of controlling the change of the gas components in the vacuum groove by the vacuum pumping system is shortened; and the change of the gas components in the vacuum groove can be rapidly detected and analyzed in real time, and the vacuum pumping system is accurately controlled.