A micro mechanical structure includes a substrate and a functional structure arranged at the substrate. The functional structure includes a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region. The functional structure further includes a conductive base layer having a conductive base layer material. The conductive base layer material includes a carbon material sectionally in a stiffening section such that a carbon concentration of the carbon material in the conductive base layer material is at least 10<14> per cubic cm and at least higher by a factor of 10<3> than in the conductive base layer material adjacent to the stiffening section.