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发明公开
CN105473981A 接触式探针的校准 有权

接触式探针的校准
摘要：
本发明涉及一种校准接触式探针的方法，该接触式探针具有接触式元件。该方法包括用该接触式探针测量已校准加工品(100、200、300、400、500)的第一几何性质和该已校准加工品或另一个已校准加工品(100、200、300、400、500)的第二几何性质。第一和第二几何性质使得该测量值与预期值之间的偏差对于该第一和第二几何性质中的每一个具有相反符号，该偏差由接触式元件的有效直径与用于确定测量值的假定直径之间的差异引起。该方法进一步包括识别接触式元件的有效直径与假定直径的差异，其包括针对第一和第二几何性质中的每一个比较测量值与预期值的偏差以确定该偏差是否存在差异。
摘要（英）：

This invention concerns a method of calibrating a contact probe having a contact element. The method comprises measuring with the contact probe a first geometric property of a calibrated artefact (100, 200, 300, 400, 500) and a second geometric property of the or a further calibrated artefact (100, 200, 300, 400, 500). The first and second geometric properties are such that a deviation between a measured value and the expected value, resulting from a difference between an effective diameter of the contact element and an assumed diameter used for determining the measured value, has the opposite sign for each of the first and second geometric properties. The method further comprises identifying a difference in the effective diameter of the contact element from the assumed diameter comprising comparing deviations of the measured value to the expected value for each of the first and second geometric properties to determine whether there is a difference in the deviations.

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