The invention discloses a vertical heat treatment device, which comprises a wafer boat, an insulation barrel and a process door, wherein the insulation barrel comprises a base, upright posts, a quartz housing and multiple groups of male tabs. The vertical heat treatment device can effectively fix various components of the wafer boat and the insulation barrel so that various components of the water boat and the insulation barrel have relatively good concentricity and stability in a reaction chamber; simultaneously accurate positioning of the male tabs of the insulation barrel can be ensured; the male tabs of the insulation barrel can be replaced according to different process requirements; the equipment cost is reduced; the compatibility of the insulation barrel is improved; and thevertical heat treatment device has the advantages of being reasonable in structure and convenient to install. Meanwhile, the quantity, the diameters and the intervals of the male tabs of the insulation barrel can be adjusted to adapt to the temperature requirements of different processes, so that the influence on local wafers caused by a temperature change is improved; the uniformity of a temperature field of the reaction chamber is ensured; and the film thickness uniformity of wafer reaction is improved.