A time-of-flight (TOF) sensor device is provided with features for correcting distance measurement offset errors caused by such factors as temperature, dynamic reflectivity ranges of objects in the viewing space, or other factors. In various embodiments, the TOF sensor device generates corrected distance values based on comparison of two different distance values measured for an object by two different measurement techniques, including but not limited to phase shift measurement, pulsed TOF measurement, distance measurement based on the focal length of the TOF sensor's lens, and comparison of distance variations with light intensity variations. In addition, some embodiments of the TOF sensor device perform self-calibration using internal waveguides or parasitic reflections as distance references.