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发明授权
CN106068547B 外延晶圆的制造方法及外延生长用硅系基板 有权

外延晶圆的制造方法及外延生长用硅系基板
摘要：
本发明为一种外延晶圆的制造方法，该外延晶圆在硅系基板上具有外延层，该外延晶圆的制造方法的特征在于，在对所述硅系基板的外周部进行平台加工后，使半导体层在所述硅系基板上外延生长。由此，提供一种在硅系基板上具有外延层的外延晶圆的制造方法，该外延晶圆的制造方法能够获得一种完全无裂痕的外延晶圆。
摘要（英）：

A method of manufacturing an epitaxial wafer having an epitaxial layer on a silicon-based substrate, the method of manufacturing the epitaxial wafer including epitaxially growing a semiconductor layer on the silicon-based substrate after applying terrace processing to an outer peripheral portion of the silicon-based substrate. As a result, the method of manufacturing the epitaxial wafer having the epitaxial layer on the silicon-based substrate in which an epitaxial wafer which is completely free from cracks can be obtained, is provided.

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