The invention provides a manufacturing apparatus and a manufacturing method of a thin film solar cell, wherein the manufacturing apparatus and the manufacturing method shorten time required in scribing. The manufacturing apparatus comprises the components of a carrying platform for carrying a substrate (10) on which an intermediate layer (23) is formed; an edge tool for forming a line (30) on the intermediate layer (23); a head which presses the edge tool on the intermediate layer (23); a scanning mechanism which performs scanning on the edge tool through making the head perform relative movement relative to the carrying platform; and a control device which controls motion of the head and the scanning mechanism. The control device realizes forming of a machining starting point (30X) of the line (30) through pressing the edge tool and furthermore sustains the state of pressing the edge tool and furthermore scanning the edge tool after the machining starting point (30X) is formed. Therefore, the line (30) is formed on the intermediate layer (23), and furthermore a force in pressing the edge tool for forming the machining starting point (30X) is larger than the pressing force in forming the line (30).