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发明授权
CN106170737B 抗反射涂料组合物及其方法 有权 转让

抗反射涂料组合物及其方法
摘要：
本发明涉及一种新的吸收性抗反射涂料组合物，其包含新的可交联的聚合物，该聚合物包含至少一种具有结构(1)的重复单元(A)、至少一种具有结构(2)的重复单元(B)和至少一种具有结构(3)的重复单元(C)。其中D是直接价键或者C(R1)(R2)亚甲基结构部分，其中R1和R2独立的是H、C1‑C8烷基、C3‑C24环烷基或者C6‑C24芳基；Ari、Arii、Ariii和Ariv独立的是苯系和萘系结构部分，R3和R4独立的是氢或者C1‑C8烷基；和R5和R6独立的是氢或者C1‑C8烷基；和溶剂。本发明还涉及使用该新的抗反射涂料组合物形成图像的方法。
摘要（英）：

The present invention relates to a novel absorbing antireflective coating composition comprising a novel crosslinkable polymer comprising at least one repeat unit (A) having structure (1), at least one repeat unit (B) having a structure (2), and at least one repeat unit (C) having structure (3) where D is a direct valence bound or C(R1)(R2) methylene moiety where R1 and R2 are independently H, C1-C8 alkyl, C3-C24 cycloalkyl or C6-C24 aryl; Ari, Arii, Ariii and Ariv are independently phenylenic and naphthalenic moiety, R3 and R4 are independently hydrogen or C1-C8 alkyl; and R5 and R6 are independently hydrogen or C1-C8 alkyl; and a solvent. The invention also relates to a process for forming an image using the novel antireflective coating composition.

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