The invention discloses an anti-breakthrough vacuum EGR valve, which comprises a valve body, wherein a vacuum cavity, a waste gas cavity, a central rod and a valve block mechanism are arranged in the valve body, and a waste gas inlet and a waste gas outlet are formed in the wall of the waste gas cavity; the central rod is horizontally arranged, the vacuum cavity and the waste gas cavity are respectively positioned on two ends of the central rod, and the waste gas inlet and the waste gas outlet are respectively formed in the lower part and the upper part of the waste gas cavity in a staggered manner; a baffle fixed on the inner wall of the valve body is arranged in the waste gas cavity correspondingly to the waste gas inlet, and a waste gas buffering channel is arranged between the baffle and the waste gas inlet; a waste gas flowing out channel is arranged in the waste gas cavity; the waste gas buffering channel and the waste gas flowing out channel are arranged in parallel to the central rod; and the valve block mechanism is arranged in the waste gas cavity between the waste gas buffering channel and the waste gas flowing out channel. The anti-breakthrough vacuum EGR valve not only can prevent the EGR from being broken through by waste gas during the emergent accelerating or sudden load application of an automobile, but also can solve the problems that the braking effect of a large truck cannot be guaranteed due to mistaken breakthrough by waste gas during braking.