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发明公开
CN106298601A 晶圆储存筒 无效 - 撤回

晶圆储存筒
摘要：
本发明涉及一种晶圆储存筒，包括内筒及外圈，所述内筒的中心具有套孔，内筒的周面间隔设有多个安放槽，所述外圈上设有与所述安放槽对应的卡槽，所述安放槽的径向长度大于所述外圈的径向长度，所述晶圆放置于所述安放槽与卡槽之间。本发明中，晶圆围绕放置在储存筒上，结构紧凑，占用空间小，仓储成本低。
摘要（英）：

The invention relates to a wafer storage barrel which comprises an inner barrel and an outer ring. A sleeve hole is formed in the center of the inner barrel. Multiple placement grooves are formed in the circumferential face of the inner barrel at intervals. The outer ring is provided with clamping grooves corresponding to the placement grooves. The radial length of the placement grooves is larger than that of the outer ring. Wafers are placed between the placement grooves and the clamping grooves. The wafers are placed in the storage barrel in a surrounding mode, and the wafer storage barrel is compact in structure, small in occupied space and low in storage cost.

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