The invention discloses a method of testing resistivity of an ion irradiation sample irradiation damage area. The method comprises the following steps: 1) an ion irradiation sample comprises an irradiation damage layer and an ion irradiation undamaged substrate layer is provided, the general resistance R0 of the ion irradiation sample and the thickness H2 of the ion irradiation undamaged substrate layer are measured; 2) the ion irradiation sample is thinned, and the resistance R of the ion irradiation sample after thinning and the thickness H of the thinned layer are measured; and 3) the resistivity of the ion irradiation sample irradiation damage area is calculated according to the following mathematical computation formula. Besides, the invention also discloses a method of testing conductivity of the ion irradiation sample irradiation damage area. Thus, according to the method of testing the resistivity and the conductivity of the ion irradiation sample irradiation damage area, in a method of combining experiment and computation derivation, the resistivity and the conductivity of the ion irradiation sample irradiation damage area are acquired, the computation result is accurate, the testing method is simple and easy to operate, and the cost is low. The mathematical computation formula is shown as in the specifications.