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发明公开
CN106574147A 抛光液及其使用方法 无效 - 撤回

抛光液及其使用方法
摘要：
本发明公开了一种抛光液，该抛光液包含流体组分和多个调理颗粒。流体组分包括水、碱性pH调节剂和聚合物增稠剂。聚合物增稠剂以基于抛光液的总重量计大于0.01重量％存在于流体组分中。
摘要（英）：

A polishing solution includes a fluid component and a plurality of conditioning particles. The fluid component includes water, a basic pH adjusting agent, and a polymeric thickening agent. The polymeric thickening agent is present in the fluid component at greater than 0.01 weight percent based on the total weight of the polishing solution.

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