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CN106575532A 用于辐照衬底的紫外线系统和方法 有权

用于辐照衬底的紫外线系统和方法
摘要：
用于辐照衬底(26)的UV系统(10)包括具有罩壳的灯头(16)，所述罩壳具有内部。UV灯泡(24)定位在所述内部中，并且能够在被RF能量激发时发射UV能量。所述UV系统(10)还包括能够生成所述RF能量的固态RF源(12)。RF能量被传送到所述UV灯泡(24)，这导致所述UV灯泡(24)点燃并且从所述灯头(16)的所述内部发射UV能量。
摘要（英）：

A UV system (10) for irradiating a substrate (26) includes a lamphead (16) having an enclosure with an interior. A UV bulb (24) is positioned in the interior and is capable of emitting UV energy when excited by RF energy. The UV system (10) also includes a solid state RF source (12) capable of generating the RF energy. The RF energy is transmitted to the UV bulb (24), which causes the UV bulb (24) to ignite and emit the UV energy from the interior of the lamphead (16).

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