The invention provides a sensor for an immersion lithographic apparatus, the lithographic apparatus and a device manufacturing method using the immersion lithographic apparatus. The sensor comprises the components of a component which contacts with immersion liquid that is supplied to a space that is adjacent with a final element of a projection system; a transducer which is configured for converting stimulation into an electric signal; a temperature regulating device which is configured for performing speed regulation of the transducer by means of a heat transfer medium that is supplied by a coolant supplying device; and a controller which is configured for controlling the temperature regulating device for actively controlling the temperature of the transducer.