The invention relates to a high-precision temperature control method and a temperature control device based on particle accelerator material irradiation. The temperature control device comprises an infrared temperature measuring unit, a resistance heating unit, a water cooling and air cooling unit, a signal control/transmission unit, a sample stage and an irradiation sample thereon, and the like. The sample stage integrates and combines the resistance heating unit and the water cooling and air cooling unit to control irradiation sample heating and cooling simultaneously. The implementation principle of the temperature control method using the temperature control device is as follows: the irradiation temperature of a material is measured in real time using the device, the power of a resistance heating wire and the flow of cooling water and cooling air are controlled via instruction signal transmission lines connected to the computer program control system, and the resistance heating unit and the water cooling and air cooling unit are adjusted automatically and simultaneously to carry out temperature control. Through the temperature control device and the temperature control method of the invention, real-time, automatic and accurate control on the irradiation temperature of a particle accelerator material can be realized, and the temperature control accuracy of particle accelerator material irradiation can be improved greatly.