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发明公开
CN107078089A 用于工件的静电夹持的系统和方法 无效 - 驳回

用于工件的静电夹持的系统和方法
摘要：
一种用于将工件夹持到静电夹具(ESC)的系统和方法包括将第一工件放置在ESC的表面上，并且将第一组夹持参数施加到ESC，其中用第一夹持力将第一工件夹持到ESC的表面。确定工件到ESC的夹持程度，并且基于工艺配方停止将第一组夹持参数施加到ESC。在停止将第一组夹持参数施加到ESC之后，将第二组夹持参数施加到ESC，并且当工件到ESC的夹持程度小于或近似等于阈值夹持值时，在将第二组夹持参数施加到ESC的同时，从ESC的表面移除工件ESC。在从ESC的表面移除工件之后，再停止到ESC的第二组夹持参数。
摘要（英）：

A system and method for clamping a workpiece to an electrostatic clamp (ESC) comprises placing a first workpiece on a surface of the ESC and applying a first set of clamping parameters to the ESC, therein clamping the first workpiece to the surface of the ESC with a first clamping force. A degree of clamping of the workpiece to the ESC is determined and the application of the first set of clamping parameters to the ESC is halted based on a process recipe. A second set of clamping parameters is applied to the ESC after halting the application of the first set of clamping parameters to the ESC, and the workpiece is removed from the surface of the ESC concurrent with the application of the second set of clamping parameters to the ESC when the degree of clamping of the workpiece to the ESC is less than or approximately equal to a threshold clamping value. The second set of clamping parameters to the ESC is further halted after removing the workpiece from the surface of the ESC.

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