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发明授权
CN107168016B 光源装置以及具备该光源装置的曝光装置 有权

光源装置以及具备该光源装置的曝光装置
摘要：
光源装置具备：光源部，具有包含出射第一波长的光的多个LED元件在内的第一光放射区域、以及包含出射与上述第一波长不同的第二波长的光的多个LED元件在内的第二光放射区域；光检测部，检测第一波长的光的强度；以及控制部，构成为能够对于第一光放射区域以及第二光放射区域分别独立地进行通电的接通、断开控制。控制部具有存储部，该存储部存储有关于第一波长的光的目标累计光量即第一目标累计光量的信息，在基于由光检测部检测出的上述第一波长的光的强度而计算出的累计光量达到第一目标累计光量时，与针对第二光放射区域的通电的控制独立地进行使针对第一光放射区域的通电停止的控制。
摘要（英）：

Light source apparatus includes a light source, a LED element contains the first shot wavelength of light, the first light radiation area, and contains a plurality of LED elements with the first shot second wavelength wavelength light, second light emitting region; light detection, detection of the first wavelength of light strength; and a control section constituted for light radiation for the first region and the second light emitting region independently connected, power off control. A control unit includes a storage unit, the storage unit stores a first wavelength of light light is the first target target total cumulative quantity of information, the cumulative reach in a light quantity detected by the detection of light of the first wavelength of light intensity based on the calculated cumulative amount of light first target, and for the second light emitting region the electric control independently the control power on the first light emission region stop.

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