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发明授权
CN107195772B 霍尔传感器 有权

霍尔传感器
摘要：
本发明提供一种即使在无岛构造的霍尔传感器中使GaAs霍尔元件小型化和薄型化的情况下也能够防止漏电流的增大的霍尔传感器。具备：GaAs霍尔元件(10)，其具备设置在GaAs衬底(11)上的感磁部(12)、电极部(13a～13d)、以及设置在GaAs衬底的与设置有电极的面相反一侧的面侧的保护层(40)；引线端子(22～25)，其配置在GaAs霍尔元件的周围；金属细线(31～34)，其将电极与引线端子分别电连接；以及模制构件(50)，其对上述部件进行模制。保护层和引线端子的第一面(即同与金属细线连接的面相反一侧的面)从模制构件(50)的同一面露出。GaAs衬底的电阻率为5.0×107Ω·cm以上。
摘要（英）：

The invention provides a Hall sensor which can prevent enlargement of leakage current when a GaAs Hall element is allowed to be mini type and thin type in a Hall sensor without an island structure. The Hall sensor includes: a GaAs Hall element (10) provided with a magnetic sensing part (12) and electrode parts (13a to 13d) which are positioned on a GaAs substrate (11), and provided with a protective layer (40) positioned on the GaAs substrate (11) and on a surface opposite to a surface provided with electrodes; lead terminals (22 to 25) arranged around the GaAs Hall element; metallic thin wires (31 to 34) electrically connecting each electrode and a corresponding lead terminal; a molding component (50) for molding the above components; first surfaces of the protective layer (40) and the lead terminals (22 to 25) (surfaces opposite to a surface connected to the metallic thin wires) are out from the same surface of the molding component (50); the electrical resistivity of the GaAs substrate is more than 5.0 * 107 Omega . cm.

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