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发明公开
CN107226680A 一种注浆成型高密度ITO靶材的制备方法 无效 - 驳回

一种注浆成型高密度ITO靶材的制备方法
摘要：
本发明公开一种注浆成型高密度ITO靶材的制备方法，包括以下步骤：取分散剂加入水中，搅拌均匀，用氨水调pH值至8～11，得预混液；向预混液中加入ITO粉体，经球磨机湿磨后；将制得的浆料进行真空除气，把除气后料浆注入石膏模具中；经吸浆成型后脱模，将生坯晾干72h以上，得ITO素坯体；素坯体烧结得ITO靶材。本发明采用注浆成型与无压氧气气氛烧结ITO靶材工艺路线，可低成本生产高致密化的高端ITO靶材。
摘要（英）：

The invention discloses a preparation method of a high-density ITO target molded by slip casting. The preparation method comprises adding a dispersant into water, stirring evenly the solution, adjusting the pH to 8 to 11 through ammonium hydroxide so that a premixed solution is obtained, adding ITO powder into the premixed solution, carrying out wet grinding by a ball mill, carrying out vacuum degassing on the slurry, injecting the degassed slurry into a gypsum mold, carrying out slurry suction molding, carrying out demolding, airing a green body for 72h or more to obtain an ITO biscuit and sintering the ITO biscuit to obtain the ITO target. Through the process route of pouring and molding and non-pressure ITO target sintering in the oxygen atmosphere, the high-density high-quality ITO target is produced in a low cost.

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