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发明授权
CN107254672B 真空镀膜设备的检测系统 有权 转让

真空镀膜设备的检测系统
摘要：
本发明提供一种真空镀膜设备的检测系统，所述检测系统包括控制装置和检测装置，所述检测装置包括摄像头和驱动结构，所述摄像头与所述驱动结构连接，所述控制装置包括控制单元，所述摄像头用于对所述真空镀膜设备的内部进行拍摄，所述控制单元用于控制所述驱动结构驱动所述摄像头移动。本发明提供的真空镀膜设备的检测系统，所述控制单元可以控制所述驱动结构驱动所述摄像头移动，所述摄像头移动可以对所述真空镀膜设备的内部的各个细节进行拍摄，从而在真空环境中便可以实现对真空镀膜设备的内部进行检测，避免真空镀膜设备的内部暴露在大气环境中。
摘要（英）：

The invention provides a detection system of vacuum coating equipment. The detection system comprises a control device and a detection device. The detection device comprises a camera and a driving structure. The camera is connected with the driving structure. The control device comprises a control unit. The camera is used for taking pictures for the interior of the vacuum coating equipment. The control unit is used for controlling the driving structure to drive the camera to move. According to the detection system of the vacuum coating equipment, the control unit can control the driving structure to drive the camera to move, the camera moves to take pictures for all details in the vacuum coating equipment, accordingly, the interior of the vacuum coating equipment can be detected in the vacuum environment, and the interior of the vacuum coating equipment is prevented from being exposed in atmosphere environment.

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