利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN107271721A 高准确度且对温度和老化具有低灵敏度的MEMS加速度传感器 有权

高准确度且对温度和老化具有低灵敏度的MEMS加速度传感器
摘要：
公开了高准确度且对温度和老化具有低灵敏度的MEMS加速度传感器。一种加速度传感器，具有：悬置区域(21)，该悬置区域相对于支撑结构(24)可移动；以及感测组件(37)，该感测组件耦合至该悬置区域并且被配置成用于检测该悬置区域相对于该支撑结构的移动。该悬置区域(21)具有在与各自的质心相关联的彼此不同的至少两个构型之间可变的几何形状。该悬置区域(21)由可旋转地锚定至该支撑结构(24)的第一区域(22)以及通过弹性连接元件(25)耦合至该第一区域(22)的第二区域(23)形成，该弹性连接元件被配置成用于允许该第二区域(23)相对于该第一区域(22)相对移动。驱动组件(40)耦合至该第二区域(23)，以便控制该第二区域相对于该第一区域的相对移动。
摘要（英）：

The invention discloses an accelerometric sensor in the MEMS technology having high accuracy and low sensitivity to temperature and ageing. The accelerometric sensor has a suspended region (21), mobile with respect to a supporting structure (24), and a sensing assembly (37) coupled to the suspended region and configured to detect a movement of the suspended region with respect to the supporting structure. The suspended region (21) has a geometry variable between at least two configurations associated with respective centroids, different from each other. The suspended region (21) is formed by a first region (22) rotatably anchored to the supporting structure (24) and by a second region (23) coupled to the first region (22) through elastic connection elements (25) configured to allow a relative movement of the second region (23) with respect to the first region (22). A driving assembly (40) is coupled to the second region (23) so as to control the relative movement of the latter with respect to the first region.

公开/授权文献
0/0