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发明公开
CN107406970A 用于蒸发材料的设备 无效 - 撤回

用于蒸发材料的设备
摘要：
用于沉积预定量的材料到衬底上的实例设备包括具有被配置成容纳材料的腔体的容器。容器和腔体沿着容器的第一轴伸长。设备另外包括一个或多个加热器，其(i)沿着第一轴伸长并且(ii)被配置成通过加热容器加热和蒸发材料。设备另外包括输送机，用于朝着基本上垂直于容器的第一轴和容器中沿着第一轴分布的一个或多个开口的方向移动衬底。一个或多个开口提供容器外部区域与腔体之间的流体连通。本文还公开了用于沉积预定量的材料到衬底上的方法。
摘要（英）：

An example apparatus for depositing a predetermined amount of a material onto a substrate includes a container having a cavity configured to contain the material. The container and the cavity are elongated along a first axis of the container. The apparatus further includes one or more heaters that are (i) elongated along the first axis and (ii) configured to heat and evaporate the material by heating the container. The apparatus further includes a conveyor for moving the substrate in a direction substantially perpendicular to the first axis of the container and one or more openings in the container distributed along the first axis. The one or more openings provide fluid communication between a region external to the container and the cavity. A process for depositing the predetermined amount of the material onto the substrate is also disclosed herein.

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