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发明公开
CN107424947A 薄膜电池工艺设备的温度测试方法及系统 无效 - 撤回

薄膜电池工艺设备的温度测试方法及系统
摘要：
本发明提供了一种薄膜电池工艺设备的温度测试方法及系统，该方法包括：步骤S1、使测试装置依次进入工艺设备的进片腔、加热腔、工艺腔、冷却腔和出片腔，并依次测试并同时存储加热腔、工艺腔和冷却腔中各个加热区的当前温度；步骤S2、将当前温度与预设温度进行比对，根据比对结果调整加热腔、工艺腔和冷却腔中的各个加热区的加热器的加热温度。本发明提供的薄膜电池工艺设备的温度测试方法及系统通过测试装置来测试热腔、工艺腔和冷却腔中各个加热区的当前温度，将当前温度存储在存储装置中，并调整加热器的加热温度，使当前温度升高或降低，提高了薄膜电池的加工质量。
摘要（英）：

The invention provides a temperature test method and system of thin film battery process equipment. The method comprises the steps of S1, allowing a test device to sequentially enter a feeding cavity, a heating cavity, a process cavity, a cooling cavity and a discharging cavity of the process equipment, sequentially performing test, and simultaneously storing a current temperature of each heating region in the heating cavity, the process cavity and the cooling cavity; and 2, comparing the current temperature with a preset temperature, and adjusting a heating temperature of a heater of each heating region in the heating cavity, the process cavity and the cooling cavity according to a comparison result. In the temperature test method and system of the thin film battery process equipment, provided by the invention, the current temperature of each heating region in the heating cavity, the process cavity and the cooling cavity is tested by the test device, the current temperature is stored in a storage device, the heating temperature of the heater is adjusted, so that the current temperature is raised or reduced, and the processing quality of a thin film battery is improved.

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