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发明授权
CN107665850B 基板的对接装置及对接方法 有权

基板的对接装置及对接方法
摘要：
本发明提供了一种基板的对接装置及对接方法，其中，基板的对接装置包括带动基板旋转的旋转机构以及至少一个基板吸附机构，所述基板吸附机构用于支撑并固定基板，所述旋转机构带动所述基板吸附机构旋转。通过本发明提供的基板的对接装置，以实现当基板需从不同角度位置进入基板产线设备或版库时，可优先对基板进行旋转以达到所需的角度位置，进而实现基板的旋转对接的过程。
摘要（英）：

Provided are a docking device and method for a substrate. The docking device for a substrate comprises a rotation mechanism (110) driving a substrate to rotate and at least one substrate suction mechanism (120). The substrate suction mechanism (120) is used to support and fix the substrate. The rotation mechanism (110) drives the substrate suction mechanism (120) to rotate. The docking device for a substrate can preferentially rotate a substrate to a required angular position when the substrate needs to enter a substrate production line apparatus or enter a storage area from a different angular position, thereby realizing rotary docking of the substrate.

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