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发明公开
CN107689336A 盖体和使用了该盖体的基板处理装置 有权

盖体和使用了该盖体的基板处理装置
摘要：
本发明的目的在于提供一种能够防止副生成物的附着本身的盖体和使用了该盖体的基板处理装置。该盖体具有：金属板；石英板，其设置于该金属板上；螺纹孔，其贯穿所述石英板，该螺纹孔设置到所述金属板的预定深度；螺钉，其插入该螺纹孔，该螺钉用于将所述石英板固定于所述金属板；以及吹扫气体供给孔，其在俯视时设置于比该螺钉靠内侧的位置，该吹扫气体供给孔能够从所述金属板的内部朝向所述石英板的底面供给吹扫气体，以便能够向所述石英板与所述金属板之间的间隙供给吹扫气体。
摘要（英）：

An object of the present invention is to provide a lid body capable of preventing attachment of by-products and a substrate processing apparatus using the lid body. The cover body comprising: a metalplate; a quartz plate provided on the metal plate; a screw hole penetrating through the quartz plate and provided to a predetermined depth of the metal plate; a screw inserted into the screw hole, A screw for fixing the quartz plate to the metal plate; and a purge gas supply hole provided inward of the screw in a plan view, the purge gas supply hole extending from the metal plate A purge gas is supplied inside toward the bottom surface of the quartz plate so that a purge gas can be supplied to a gap between the quartz plate and the metal plate.

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