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发明公开
CN107727309A 压力测量单元和用于涂覆压力测量单元的载体的方法 无效 - 驳回

压力测量单元和用于涂覆压力测量单元的载体的方法
摘要：
本发明涉及压力测量单元(50)和用于涂覆压力测量单元(50)的载体(52)的方法，以及涉及具有这种压力测量单元(50)的压力传感器机构，该压力测量单元具有构成测量膜(52.1)的载体(52)，该测量膜在待检测的压力(P)的作用下变形，其中在载体(52)的表面上施加有绝缘层(54)，在该绝缘层上施加有测量结构(55)，该测量结构检测测量膜(52.1)的变形并且产生至少一个代表所检测的压力(P)的电输出信号。在此绝缘层(54)被施加为在其上印制测量结构(55)的等离子体层。
摘要（英）：

The invention relates to a pressure measuring unit (50), a method of coating a carrier (52) of the pressure measuring unit (50), and a pressure sensor mechanism with the pressure measuring unit (50).The pressure measuring unit (50) has the carrier (52) which forms a measuring diaphragm (52.1) which deforms under the action of a pressure (P) to be detected, wherein an insulating layer (54) is applied to a surface of the carrier (52). A measuring structure (55) is applied to the insulating layer, and detects the deformation of the measuring diaphragm (52.1) and generates at least one electric output signal representing the detected pressure (P). A plasma layer of the measuring structure (55) is printed on the insulating layer (54).

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