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发明公开
CN107850062A 真空泵系统 无效 - 驳回

真空泵系统
摘要：
一种真空泵系统(4、5、6)，其包含多个彼此并联连接并且各自在入口侧连接到腔室(40、50、60)的真空泵(P41、P42、P43、P44、P45、P51、P52、P61、P62)，其具有在真空泵(P41、P42、P43、P44、P45、P51、P52、P61、P62)的出口侧连接的出口管线(41)，以及将至少一个真空泵(P41、P42、P43、P44、P45、P51、P52、P61、P62)的入口侧连接到出口管线(41)的中间管线(42)，其特征在于在抽出期间所有真空泵(P41、P42、P43、P44、P45、P51、P52、P61、P62)是并联连接的，并且在空闲期间真空泵(P41、P42、P43、P44、P45、P51、P52、P61、P62)的至少一个与其他的真空泵串联连接作为前级泵。
摘要（英）：

A vacuum pump system (4, 5, 6) comprising a plurality of vacuum pumps (P41, P42, P43, P44, P45, P51, P52, P61, P62) which are connected to one another in parallel and each connected on an inlet side to a chamber (40, 0, 60), having an outlet line (41) which is connected on the outlet side of the vacuum pumps (P41, P42, P43, P44, P45, P51, P52, P61, P62), and an intermediate line (42) which connects the inlet side of at least one vacuum pump (P41, P42, P43, P44, P45, P51, P52, P61, P62) to the outlet line (41), characterized in that all the vacuum pumps (P41, P42, P43, P44, P45, P51, P52, P61,P62) are switched to be in parallel during a pumping out period and at least one of the vacuum pumps (P41, P42, P43, P44, P45, P51, P52, P61, P62) is switched to be in series with the other vacuum pumps as a backing pump during an idle period.

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