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发明公开
CN107949905A 喷嘴单元 有权

喷嘴单元
摘要：
本发明提供一种防止在向FOUP填充气体时大气进入的喷嘴单元。因此，该喷嘴单元包括：喷嘴主体(71)，其具有连通于用于收纳收纳物的容器(7)的气体供给口(72)和连通于气体供给口(72)的气体流路(77)；供给喷嘴(78)，其连接于气体流路(77)，用于经由气体供给口(72)向容器供给气体；以及排气喷嘴(83)，其连接于气体流路(77)，用于对气体流路(77)进行排气。
摘要（英）：

In order to provide a nozzle unit that prevents atmospheric air from penetrating, when gas is being filled into an FOUP, the present invention comprises: a nozzle main body 71 having a gas supply port72 connected to a container 7 housing contents to be housed and a gas flow path 77 connected to the gas supply port 72; a supply nozzle 78 connected to the gas flow path 77 and supplying gas to the container 7 via the gas supply port 72; and an exhaust nozzle 83 connected to the gas flow path 77 and evacuating the gas flow path 77.

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